The Belgian microelectronics research center (IMEC) has successfully accomplished full-wafer fabrication of nanopores by utilizing ASML’s extreme ultraviolet (EUV) lithography system. As stated by ASML’s head of public relations, this system exhibits outstanding potential for biomedical applications. Nanopores are minuscule openings with diameters measuring only a few nanometers. Leveraging the principle of molecular interaction with nanopores, they can be employed in biomedical sensors. Nanopores produced through this technology are capable of detecting and identifying individual molecules. Moreover, their size can be tailored to broaden the range of application scenarios. Traditional methods for fabricating nanopores come with certain constraints. In contrast, this research has achieved mass production, high precision, and repeatability, thus offering significant potential for advancing the practical application of nanopore sensor technology.
