Beijing Institute of Technology’s School of Integrated Circuits and Electronics Unveils Research on CMOS-MEMS Monolithically Integrated Multidimensional Sensing Chip at IEDM 2026
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Author:小编   

Recently, the groundbreaking research on a CMOS-MEMS monolithically vertically integrated temperature-humidity-flow multidimensional sensing chip, spearheaded by Professor Wang Xiaoyi and his team at the I2MEMS Institute (which is within the School of Integrated Circuits and Electronics at Beijing Institute of Technology), has been accepted for presentation at the 72nd IEEE International Electron Devices Meeting (IEDM 2026). Professor Wang's team is set to deliver an oral presentation at this prestigious conference, which will take place in San Francisco, USA, from December 12 to 16, 2026. This notable accomplishment underscores the team’s extensive research expertise and innovative prowess in the realms of intelligent sensors and integrated systems.