Samsung Electronics has placed an order with ASML for approximately 20 extreme ultraviolet (EUV) lithography machines for ultra-fine processes below 10nm. Along with deep ultraviolet (DUV) equipment, the total order for lithography equipment is around 70 units. These machines will be installed in the first phase of Fab 5 (P5) at the Pyeongtaek campus, with the EUV equipment alone valued at over KRW 10 trillion.
