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In 2025, Shanghai AMIES Semiconductor Equipment Co., Ltd. (AMIES) successfully wrapped up factory debugging and acceptance procedures for its independently developed AST6200 350nm stepper lithography machine. The machine is now primed and ready for shipment to customers. This cutting-edge equipment is compatible with 6- to 12-inch wafer processes. It boasts a high-precision alignment system and stable light source technology, rendering it an ideal choice for mature process applications, including display panels and power devices. The dispatch of this machine stands as a significant milestone in the widespread adoption and attainment of core technology autonomy for domestically manufactured lithography machines. It serves as a potent catalyst, further propelling the localization of the semiconductor equipment supply chain.
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