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Kemar Technology: 12-Inch Electrostatic Chuck Successfully Passes Verification and Enters Small-Scale Mass Production Phase
5 day ago /
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Author：小编
On November 12, Kemar Technology shared on an interactive platform that its cutting-edge ceramic products are predominantly utilized in the front-end process equipment for wafer fabrication (inclusive of memory chips). These products have found applications across a diverse range of equipment, including etching machines, thin film deposition systems, ion implanters, photolithography tools, and oxidation diffusion units. At present, the company's 12-inch electrostatic chuck has not only cleared the verification stage but has also commenced small-scale production. Meanwhile, the development of the 12-inch multi-zone heating electrostatic chuck has been finalized, and the verification process is being vigorously pursued.
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