The State Administration for Market Regulation and the Ministry of Industry and Information Technology have collaboratively unveiled the "Action Plan for Metrology Supporting the Development of New Quality Productivity in Industry (2025-2030)." This plan directly addresses the critical needs of the integrated circuit (IC) industry, emphasizing the resolution of technological hurdles such as flattened quantity value transfer. It aims to breakthrough bottlenecks in various areas, including metrological testing of defect particles at the wafer level, parameter standardization and chipization, as well as the development of advanced packaging reference materials. Furthermore, the plan outlines strategies to innovate atomic-scale metrological devices and methods, conquer key parameters pertaining to IC metrology technology, explore online metrology techniques, and conduct comprehensive metrological testing and evaluation. The ultimate goal is to establish a robust and comprehensive IC metrology system.