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TSMC Deputy Co-COO Chang Hsiao-Chiang: High NA EUV Not Yet Necessary for Advanced Process
2025-05-28 /
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Author：小编
Chang Hsiao-Chiang, Senior Vice President of TSMC, emphasized that the company does not currently require the integration of High NA EUV technology into its 1.4nm-class logic process, A14. According to Chang, substantial performance enhancements can still be achieved by refining the existing Low NA EUV technology. He further noted that even without deploying High NA EUV patterning equipment, the A14 process maintains an exceptional level of performance. Intel, too, has displayed a cautious stance towards High NA EUV technology at comparable process nodes, presenting flexibility in its decision to adopt or forgo the technology.
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