On October 20th, CAS Instrument made an announcement detailing its intention to forge ahead with an expansion project focused on dry vacuum pumps for integrated circuits. This strategic move builds upon the foundation laid by the existing "Industrialization Construction Project of Dry Vacuum Pumps" and the "Expansion Project of High-End Semiconductor Equipment." The financial backbone of this project will be self-supporting, with a total investment amounting to 423.1348 million yuan. Specifically, Shenyang Scientific Instrument Co., Ltd., under the aegis of the Chinese Academy of Sciences, along with its Shanghai branch, will contribute 191.447 million yuan, with the parent company acting as the primary implementing entity. Additionally, CAS Instrument (Nantong) Semiconductor Equipment Co., Ltd. will invest 231.6878 million yuan and undertake the role of implementing entity for its respective portion of the project.