Recently, Huahai Qingke successfully shipped its independently developed fully automatic panel-level CMP mass production equipment, the Master-P510APEX. This equipment has been dispatched to an advanced packaging production line for mass production applications. Notably, the Master-P510APEX stands as the first fully automatic panel-level CMP equipment in China to be integrated into a mass production line. It has been meticulously designed to cater to the process characteristics inherent in large-size panel-level packaging. The equipment boasts capabilities for achieving uniformity and planarization control across the entire panel, meeting the stringent low-defect polishing requirements. Additionally, it facilitates flexible switching between various process modes through intelligent endpoint detection and automated control systems. This provides robust support for high-consistency, high-yield mass production on advanced packaging production lines.