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Launch of China's First Indigenous Commercial Electron Beam Lithography Machine 'Xizhi' in Hangzhou
2025-08-14 /
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Author：小编
Hangzhou has witnessed the application testing of China's first domestically produced commercial electron beam lithography machine, named 'Xizhi'. This equipment boasts a precision on par with international mainstream devices, signifying a monumental advancement in China's quantum chip research and development landscape. Independently developed by the Yuhang Quantum Research Institute at Zhejiang University, 'Xizhi' utilizes high-energy electron beams to 'handcraft' circuits onto silicon substrates with a remarkable precision of 0.6 nanometers. Dubbed the 'nano divine brush', it is specifically tailored for the pivotal areas of quantum chip and new semiconductor research and development.
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