China has recently introduced its first domestically produced commercial electron beam lithography machine, named "Xizhi," in Hangzhou. Developed independently by the Yuhang Quantum Research Institute at Zhejiang University, this advanced equipment has already entered the application testing phase. The "Xizhi" represents a new generation of 100kV electron beam lithography machines, resembling a substantial steel cabinet and focusing on the core R&D areas of quantum chips and innovative semiconductors. Boasting a precision of 0.6nm and a line width of 8nm, it stands on par with leading international equipment. A key advantage of this machine is its ability to facilitate flexible design modifications without the necessity of photomasks, making it ideal for iterative debugging during the early stages of chip research and development. This significant achievement signifies the availability of a "Chinese engraving knife" tailored for quantum chip R&D.