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Researchers at the Shanghai Institute of Microsystem and Information Technology, affiliated with the Chinese Academy of Sciences, have pioneered a state-of-the-art 10mm large-aperture piezoelectric MEMS fast steering mirror. Leveraging double-layer heterogeneous integration technology, this innovative mirror excels in linearity, angular resolution, and responsiveness. Boasting a dynamic surface deformation of just 2 nanometers, it surpasses both traditional and commercial alternatives, facilitating high-precision closed-loop control of laser beams and addressing the demands of satellite laser communication. This breakthrough offers a compact, high-performance solution tailored for the aerospace industry, and the associated research has been featured in Microsystems & Nanoengineering.
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