Recently, the Intelligent Micro-Nano Circuits and Microsystem Integration Team, led by Professor Zhang Xiaosheng from the School of Electronic Science and Engineering at the University of Electronic Science and Technology of China (UESTC), achieved a significant milestone by publishing a paper titled “Self-Calibrated Magnetic Field Detection System Based on AM/FM Dual-Mode Lorentz Force” in IEEE Transactions on Industrial Electronics, widely recognized as a leading journal in the field of industrial electronics.

This innovative study leverages the Lorentz force effect to implement two distinct magnetic field sensing modes—Amplitude Modulation (AM) and Frequency Modulation (FM)—within a single silicon-based aluminum nitride MEMS resonator. By capitalizing on the different sensitivities of the MEMS resonator to ambient magnetic fields and temperature in these two modes, the research successfully achieves single-chip integration for the simultaneous detection and decoupling of magnetic fields and temperature.

Additionally, the team designed a specialized sensing signal interface circuit, comprising a main oscillation loop and an auxiliary oscillation loop. Together with the signal processing circuit, these components form a complete self-calibrated magnetic field detection system. In contrast to traditional methods that rely on separate temperature sensors for temperature compensation, this system integrates both magnetic field and temperature sensing functions into a single device. This allows for direct measurement of the temperature of the magnetic field sensing unit itself, resulting in more precise temperature compensation.

This groundbreaking approach offers fresh perspectives for research on multi-parameter and multi-mode sensing integration chips, paving the way for future advancements in the field.