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The team of Peng Hailin from Peking University has conducted in-situ analysis of the microscopic behavior of photoresist and achieved high-resolution photolithography compatible with wafer fabs.
2025-10-14 /
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Author：小编
Since the rise of the semiconductor industry, photolithography technology has remained crucial and serves as one of the core driving forces propelling the continuous miniaturization of integrated circuit chip manufacturing processes.
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