Calcium fluoride crystals have emerged as pivotal components in high-end instruments, including ultraviolet lithography systems, high-resolution space cameras, and high-precision optical inspection equipment. This is attributed to their extensive transmission wavelength range, minimal dispersion effect, and robust resistance to laser damage. However, their open cubic structure leads to a high dislocation density of up to 10⁵/cm², significantly impacting their performance. Consequently, the accurate identification, analysis, and control of dislocation defects in calcium fluoride crystals are essential for enhancing their capabilities to meet demanding application requirements. Nevertheless, the sensitivity of F- ions to electron beams presents challenges in the atomic-level characterization of these crystal dislocations. Traditional techniques have struggled to elucidate their dislocation configurations and formation mechanisms.