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Shanghai Microelectronics Receives Patent for Innovative 'Vibration Reduction Device and Semiconductor Equipment'
2025-01-18 /
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Author：小编
Shanghai Microelectronics Equipment (Group) Co., Ltd. has recently been granted a patent for an innovative 'Vibration Reduction Device and Semiconductor Equipment,' bearing the authorization announcement number CN222122116U. This milestone was announced on December 6, 2024, following an application submitted on December 29, 2023. The patented technology incorporates at least three air spring assemblies and actuator assemblies, seamlessly integrating passive and active vibration reduction methodologies. This groundbreaking approach addresses the challenges of interference to vibration-sensitive semiconductor equipment components and the limited frequency range of traditional vibration reduction elements.
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