On December 24th, news emerged that Jingsheng Mechatronics has recently made a substantial leap forward in the realm of silicon carbide (SiC) core equipment. The company has successfully provided Mem-Pro Electronics, a globally renowned SiC epitaxial wafer manufacturer, with a state-of-the-art 12-inch single-wafer silicon carbide epitaxial growth system. This cutting-edge equipment is designed to be versatile, supporting both 8-inch and 12-inch SiC epitaxial production processes. Leveraging an innovative vertical split-flow gas injection mechanism, it has mastered sophisticated technologies, including ultra-precise closed-loop control of wafer surface temperature and highly accurate zonal control of process gases. Furthermore, the system is outfitted with an automated loading and unloading module, as well as a one-click automatic PM (Preventive Maintenance) support feature. These enhancements not only bolster particle control capabilities but also significantly streamline maintenance operations, ensuring optimal performance and efficiency.
