ESWIN Publishes Patent for Chuck Groove Cleaning Device, Method, and Grinding Equipment
6 day ago / Read about 0 minute
Author:小编   

On March 14, 2025, ESWIN Material Technology Co., Ltd. successfully published its patent for a 'Chuck Groove Cleaning Device, Cleaning Method, and Grinding Equipment,' under the publication number CN119609919A. This patent potentially revolutionizes maintenance technology within the semiconductor manufacturing industry, specifically targeting the enhancement of grinding chuck cleaning efficiency.