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A research team led by Associate Professor Li Xinghui from Tsinghua University's Shenzhen International Graduate School has achieved a groundbreaking advancement in multi-dimensional atomic-scale measurement technology. By developing a novel integrated heterodyne grating interferometer with zero dead zones, the team has succeeded in creating an instrument capable of achieving sub-nanometer displacement measurement with three degrees of freedom. This innovative device not only demonstrates enhanced stability and anti-interference capabilities in complex environments but also serves as a cornerstone for highly integrated, multi-dimensional measurement systems in various fields, including lithography systems, atomic-scale manufacturing, and aerospace ultra-precision measurement.
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