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Guona Semiconductor Granted Patent for 'Wafer Defect Inspection Equipment'
6 day ago /
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Author：小编
Shanghai Guona Semiconductor Technology Co., Ltd. has recently been awarded a patent for its 'Wafer Defect Inspection Equipment,' with the patent number CN112466787B. This patent application was filed on November 25, 2020, and the authorization was officially announced on March 14, 2025. The cutting-edge equipment comprises a wafer stage, an immersion liquid supply module, an image acquisition module, and a defect judgment module, all designed to significantly enhance the precision of wafer defect detection.
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