Latest Research Breakthrough in Piezoelectric MEMS Ultrasonic Transducers by Professor Yu Hongbin's Team at Huazhong University of Science and Technology
2025-05-21 / Read about 0 minute
Author:小编   

On May 19, a research team headed by Professor Yu Hongbin from the School of Optics and Electronic Information at Huazhong University of Science and Technology unveiled groundbreaking findings on piezoelectric MEMS ultrasonic transducers in the prestigious journal Microsystems & Nanoengineering. The study, titled "Piezoelectric Micromachined Ultrasonic Transducers Based on Cantilever Beams and Their Post-processing Soft-connection Strategy for Airborne Ranging," presents an innovative PMUT (Piezoelectric Micromachined Ultrasonic Transducers) design aimed at mitigating asynchronous vibrations stemming from manufacturing imperfections. By integrating a reservoir structure with a self-sealing post-processing soft-connection approach, this design efficiently curtails asynchronous vibration modes, enhancing the performance of rangefinders. Experimental data demonstrates that, after sealing, the PMUT rangefinder, powered by a sinusoidal signal of 69.2 kHz and 40 Vpp, achieves a ranging capability spanning from 270.8 mm to 3.8 m with a divergence angle approximating 170°, surpassing international commercial standards. This research was funded by the National Natural Science Foundation of China, with Professor Yu Hongbin as the corresponding author and Ph.D. student Wang Yan as the lead author.