On November 13, 2024, HACQ Tech (Beijing) Co., Ltd. saw the publication of its patent titled "Wafer Drying Device and Wafer Drying Method," bearing the publication number CN119133038A. This innovative patent comprises a chuck, support structure, rotating mechanism, and liquid recovery system, among other components. It boasts an optimized liquid discharge pathway, significantly enhancing the drying effectiveness and efficiency of liquid recovery processes.
