Recently, the storage process-compatible inline coater developer independently developed by Hefei Kaiyue Semiconductor has successfully passed inspection and been delivered to a storage chip manufacturing customer after 18 months of research and development, iteration, and reliability factory verification. This equipment is suitable for mainstream storage production lines such as 3D NAND, DRAM, and HBM, and is expected to provide a localization alternative solution for the domestic photolithography field.
