SMIC Allegedly Initiates Testing of First Locally-Made DUV Lithography Machine, Marching Toward 5nm Process
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Author:小编   

On September 17, 2025, news emerged indicating that SMIC has commenced testing a deep ultraviolet lithography (DUV) machine crafted by the Shanghai-based newcomer Yuliangsheng. This piece of equipment employs immersion technology, which bears a resemblance to the technical methodology adopted by ASML. In the past, SMIC had heavily depended on importing DUV lithography machines from ASML in the Netherlands. However, owing to the export controls imposed by the United States, SMIC was restricted to procuring older models. At present, the initial tests conducted by SMIC have generated promising outcomes. Nevertheless, it is still uncertain whether the equipment can be successfully transitioned into large-scale mass production and when exactly this might happen.