Wei Zhejia Dispels Rumors: TSMC Has Acquired High-NA EUV Lithography Machines, Yet to Deploy Them
2026-06-08 / Read about 0 minute
Author:小编   

In reaction to whispers suggesting that TSMC's reluctance to invest in next-generation lithography equipment stems from a conservative stance, Chairman Wei Zhejia clarified matters at the shareholders' meeting. He announced that the company has indeed procured the cutting-edge High-NA EUV lithography machines developed by ASML and is presently engaged in the research and development phase. However, due to the prohibitively high costs involved, mass production is not being pursued at this juncture. It has been reported that the price tag for each of these lithography machines soars to between $380 million and $400 million, which is more than twice the cost of current mainstream EUV equipment. Wei Zhejia emphasized that the exorbitant cost of the equipment is the primary factor behind the decision not to commence mass production at this time.